Ceramic heater

Coating apparatus – Gas or vapor deposition – With treating means

Reexamination Certificate

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Details

C156S345520, C156S345510, C219S444100, C219S544000, C219S464100, C219S634000, C219S638000, C118S715000, C361S234000

Reexamination Certificate

active

06887316

ABSTRACT:
A ceramic heater improving a uniformity of temperature distribution in a work heating face, wherein a resistance heating body formed on a face of a ceramic substrate opposite to the work heating face thereof is such that the scattering of thickness is within ±50% of an average thickness, and a surface roughness of the resistance heating body is a range of 0.05-100 μm as Rmax and not more than 50% of the average thickness.

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English language abstract of Japan Publication No. 08273815.
English language abstract of Japan Publication No. 08273814.
English language abstract of Japan Publication No. 06051658.
English language abstract of Japan Publication No. 04300249.
English language abstract of Japan Publication No 58-61591.
English language abstract of Japan Publication No. 57-870.
English Language Abstract of JP 4-324276.
English Language Abstract of JP 7-263530.
English Language Abstract of JP 8-306629.
English Language Abstract of JP 9-172055.
English Language Abstract of JP 9-213455.
English Language Abstract of JP 9-306642.
English Language Abstract of JP 10-189696.
English Language Abstract of JP 11-012053.
English Language Abstract of JP 11-074064.
English Language Abstract of JP 11-074336.
English Language Abstract of JP 11-40330.
English Language Abstract of JP 4-300249.
English Language Abstract of JP 11-251040.
English Language Abstract of JP 3-241380.
English Language Abstract of JP 7-263530.

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