Electric heating – Heating devices – With heater-unit housing – casing – or support means
Reexamination Certificate
2005-07-12
2005-07-12
Hoang, Tu (Department: 3742)
Electric heating
Heating devices
With heater-unit housing, casing, or support means
C219S536000, C219S538000, C219S443100
Reexamination Certificate
active
06917020
ABSTRACT:
A ceramic heater capable of reducing temperature uniformity at the periphery of through holes such as insertion holes and vacuum suction holes is provided, which protects wafer against thermal shocks and has improved controllability for temperature control parts such as thermocouples and temperature fuse. Further, a ceramic heater capable of uniform resin curing is provided. A heat generation body is disposed on the surface or inside of a ceramic substrate. Further, corners for the insertion holes, the recesses and the vacuum suction holes of the ceramic substrate are chamfered.
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Hoang Tu
Ibiden Co. Ltd.
Oliff & Berridg,e PLC
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