Ceramic diaphragm structure having convex diaphragm portion and

Details Ceramic diaphragm structure having convex diaphragm portion and Ceramic diaphragm structure having convex diaphragm portion and

1995-02-10

1996-08-13

Loney, Donald J.

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Structurally defined web or sheet

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428 49, 428174, 428210, 428212, 428219, 428325, 156 89, B32B 310, C03B 2900

Patent

active

055454615

ABSTRACT:
A ceramic diaphragm structure which includes a ceramic substrate having at least one window, and a ceramic diaphragm plate which is superposed on the ceramic substrate so as to close the window or windows. The diaphragm plate is fired with the ceramic substrate to form an integral sintered body. The diaphragm plate includes at least one diaphragm portion which is/are aligned with the window(s), respectively, and each diaphragm portion protrudes outwards, in a direction away from the corresponding window, to form a convex shape. Also disclosed is a method of protuding such a ceramic diaphragm structure, in which the diaphragm portion is formed into convex shape, upon firing of the ceramic substrate and ceramic diaphragm plate.

REFERENCES:
patent: 4525464 (1985-06-01), Claussen et al.
patent: 4894635 (1990-01-01), Yajima et al.
patent: 5089455 (1992-02-01), Ketcham et al.
patent: 5210455 (1993-05-01), Takeuchi et al.

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