Ceramic coatings from the pyrolysis in ammonia of mixtures of si

Details Ceramic coatings from the pyrolysis in ammonia of mixtures of si Ceramic coatings from the pyrolysis in ammonia of mixtures of si

1988-04-07

1989-06-27

Pianalto, Bernard

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

4271263, 4271264, 427240, 427249, 427380, 4273977, 4274192, 4274197, 4274198, 427421, 427427, 4274432, 428688, 428698, 428704, B05D 306

Patent

active

048428884

ABSTRACT:
Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example alkoxides, of aluminum, titanium, or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the nitrided ceramic SiO.sub.2 /metal oxide coating for still further protection of electronic devices.

REFERENCES:
patent: 3061587 (1963-10-01), Rust et al.
Gupta & Chin, Microelectronics Processing, Chapter 22, "Characteristics of Spin-On Glass Films as a Planarizing Dielectric", pp. 349-65, American Chemical Society, 1986.
Glasser et al., ("Effect of the H.sub.2 O/TEOS Ratio Upon the Preparation and Nitridation of Silica Sol/Gel Films", Journal of Non-Crystalline Solids 63, (1984) pp. 209-221).
Brow and Pantano, Journal of the American Ceramic Society, 70(1), pp. 9-14, 1987.

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