Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
1999-03-02
2001-07-24
Jones, Deborah (Department: 1775)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S040400, C428S041100, C428S426000, C428S428000, C428S432000, C428S450000, C427S109000, C427S249300, C427S255120, C427S255290, C065S060100, C065S060800
Reexamination Certificate
active
06265077
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a ceramic article with a surface modified layer and a method for producing the same.
2. Description of the Related Art
A jig made of an alumina sintered body is used for conveying a semiconductor material in a semiconductor-manufacturing facility. Such a jig made of an alumina sintered body, however, with a resistivity as high as 2000 to 3000 M&OHgr; or more tends to charge when used, thus causing deposition of particles on the wafer mounting surface of the jig. To solve this problem, Japanese patent number 2,621,749 attempts to prevent the charge and deposition of particles on the wafer-mounting surface, by forming a silicon carbide film on the wafer-mounting-surface by means of chemical vapor deposition and regulating the thickness of the film to reduce the surface resistivity on the wafer-mounting-surface.
SUMMARY OF THE INVENTION
The inventors tried to produce a jig with a wafer-mounting surface according to the disclosure in this patent and finally discovered the following unexpected problems. Firstly, an alumina sintered body has a thermal expansion coefficient largely different from that of silicon carbide, thus resulting in cracks in the film and its peeling from the wafer-mounting surface. Moreover, a jig with a low surface resistivity is needed for preventing particle adsorption.
It is an object of the invention to provide a ceramic article with a base and a surface modified layer, which has a high electrical conductivity and which hardly peels from the base.
The present invention provides a ceramic article having a base made of an insulating ceramic material and a conductive surface modified layer provided on the base, and the surface modified layer comprising carbon atoms as its main component, silicon atoms and atoms of at least one metal element constituting the insulating ceramic material.
The invention also provides a method for manufacturing a ceramic article having a base made of an insulating ceramic material and a conductive surface modified layer provided on the base, the ceramic material comprising at least one metal element, the method comprising the steps of:
contacting a surface of the base with a gas containing a halogen to produce a corrosion product containing the metal element on the surface; and
providing at least a carbon source gas and a silicon source gas onto the surface of the base to induce chemical vapor deposition so as to form a surface modified layer containing carbon atoms as its main component, silicon atoms and atoms of the metal element.
When forming a silicon carbide film on a base made of an alumina sintered body by means of chemical vapor deposition, the inventors tried to contact the surface of the base with a gas containing a halogen (referred to as “halogen series gas”) to produce a corrosive product and then provide a carbon source gas and a silicon source gas with a carrier gas onto the corrosion product. Surprisingly, the inventors observed the formation of an unknown surface modified layer with impressively high conductivity on the surface.
REFERENCES:
patent: 5723172 (1998-03-01), Sherman
patent: 44 41 132 A1 (1996-05-01), None
patent: 0 361 542 (1990-04-01), None
patent: 2 643 088 (1990-08-01), None
Ikeda Mitsuji
Katoh Naotaka
Nishioka Masao
Bahta Abraham
Burr & Brown
Jones Deborah
NGK Insulators Ltd.
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