Cell for epitaxy by molecular beams and associated process

Details Cell for epitaxy by molecular beams and associated process Cell for epitaxy by molecular beams and associated process

1987-05-15

1989-03-21

Pianalto, Bernard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C23C 1600

Patent

active

048133736

ABSTRACT:
It comprises a vaporization chamber containing the material to be vaporized and provided with at least one opening with a given cross-section for maintaining the material to be vaporized in the liquid state within said chamber and for emitting controlled flow molecular beams, a sleeve integral with the vaporization chamber surrounding the opening or openings having a given cross-section, heating means for maintaining the vaporization chamber isothermal and for obtaining an adequate temperature in the sleeve to prevent condensation of the vaporized material in said sleeve and in the opening or openings having a given cross-section.

REFERENCES:
patent: 4553022 (1985-11-01), Colombo
patent: 4606296 (1986-08-01), Gailliard et al.
patent: 4668480 (1987-05-01), Fusiyashu

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