Cell driving type actuator and method for manufacturing the...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S328000

Reexamination Certificate

active

06933663

ABSTRACT:
A piezoelectric/electrostrictive actuator includes a plurality of piezoelectric/electrostrictive elements arranged in comb teeth-like alignment on a base plate. The actuator is driven by means of dislocation of the piezoelectric/electrostrictive elements. The cell driving type actuator is characterized in that each of the cells is formed independently from adjacent cells by positioning cover plates between two adjacent piezoelectric/electrostrictive elements. Thus, there is provided a piezoelectric/electrostrictive actuator wherein a heating process at a high temperature can be applied and mass production at low cost is possible. The actuator includes cells with slit portions having a width of 60 μm or less and a high aspect ratio and can be activated with high electric field strength, and great displacement can be obtained with small electric field strength.

REFERENCES:
patent: 5471231 (1995-11-01), Hiraishi et al.
patent: 6106106 (2000-08-01), Nakazawa et al.
patent: 6206496 (2001-03-01), Ushioda
patent: 6223405 (2001-05-01), Oikawa et al.
patent: 6361151 (2002-03-01), Shigemura
patent: 07-081055 (1995-03-01), None
patent: 07-329290 (1995-12-01), None

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