Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent
1998-09-17
2000-12-12
Cady, Albert De
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
700101, 700102, 700111, 414217, 414227, 25033908, 25033911, 25033927, 438220, 438231, 438232, G06F 1900
Patent
active
061610542
ABSTRACT:
An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool. Cell controller software integrates an adaptive run-to-run controller, process tool recipe upload and download through a SECS port, sensor control, data archiving, and a graphical user interface.
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Bonanno Anthony S.
Eikleberry William J.
Rosenthal Peter A.
Solomon Peter R.
Cady Albert De
Dorman Ira S.
Marc McDieunel
On-Line Technologies, Inc.
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