CD metrology analysis using green's function

Details CD metrology analysis using green's function CD metrology analysis using green's function

2005-03-15

2005-03-15

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

C356S625000, C702S155000

Reexamination Certificate

active

06867866

ABSTRACT:
A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.

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