CD metrology analysis using a finite difference method

Details CD metrology analysis using a finite difference method CD metrology analysis using a finite difference method

2006-09-12

2006-09-12

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Dimension

C356S601000, C702S155000

Reexamination Certificate

active

07106459

ABSTRACT:
A method for modeling diffraction includes constructing a theoretical model of the subject. A numerical method is then used to predict the output field that is created when an incident field is diffracted by the subject. The numerical method begins by computing the output field at the upper boundary of the substrate and then iterates upward through each of the subject's layers. Structurally simple layers are evaluated directly. More complex layers are discretized into slices. A finite difference scheme is performed for these layers using a recursive expansion of the field-current ratio that starts (or has a base case) at the lowermost slice. The combined evaluation, through all layers, creates a scattering matrix that is evaluated to determine the output field for the subject.

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