Cavity uniformity having patterned spaces of aluminum oxide or s

Details Cavity uniformity having patterned spaces of aluminum oxide or s Cavity uniformity having patterned spaces of aluminum oxide or s

1996-06-13

1999-11-23

Sikes, William L.

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

349153, 349157, G02F 11339

Patent

active

059910003

ABSTRACT:
A method for forming a uniform cavity between electrode substrates of a dlay comprises the steps of patterning a border to define a display area between the electrode substrates, patterning electrode spacers between the electrode substrates, and wafer bonding the electrode substrates to the border and to the electrode spacers to form a uniform cavity within the display area. A cavity comprises a pair of substrates enclosing the cavity and patterned spacers wafer bonded to the substrates to form and maintain a uniform thickness of the cavity.

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