Cavity ring-down spectrometer for semiconductor processing

Details Cavity ring-down spectrometer for semiconductor processing Cavity ring-down spectrometer for semiconductor processing

2008-05-06

2008-05-06

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

For light transmission or absorption

Of fluent material

C356S073000, C356S519000

Reexamination Certificate

active

07369242

ABSTRACT:
An apparatus is provided for measuring a gas within a semiconductor thin film process. The apparatus includes an optical resonator disposed within an environment of the thin-film process, a tunable laser that excites the optical resonator at a characteristic frequency of the gas and a detector that detects an energy within the resonator.

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PCT International Search Report and Written Opinion from corresponding PCT application, published Jul. 13, 2007.

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