Catoptric reduction projection optical system

Details Catoptric reduction projection optical system Catoptric reduction projection optical system

1999-09-21

2000-08-29

Spyrou, Cassandra

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

359858, 359861, 359365, 359366, 359727, 359728, 359730, G02B 508

Patent

active

06109756&

ABSTRACT:
A catoptric reduction projection optical system (8), exposure apparatus (EX) including same, and a method using same for forming in a second plane (WP) a reduced image of an object (R) in a first plane (RP). The projection optical system includes, in order along a folded optical path on in optical axis (AX), from the first plane to the second plane, a first mirror (M1) having a concavely shaped reflecting surface and a first vertex, a second mirror (M2) having a second vertex, a third mirror (M3) having a convexly shaped reflecting surface and a third vertex, a single aperture stop (AS), and a fourth mirror (M4) having a concavely shaped reflecting surface and a fourth vertex. The projection optical system also preferable satisfies a number of design conditions.

REFERENCES:
patent: 5220590 (1993-06-01), Bruning et al.
patent: 5309276 (1994-05-01), Rodgers
patent: 5315629 (1994-05-01), Jewell et al.
patent: 5805365 (1998-09-01), Sweatt
patent: 5815310 (1998-09-01), Williamson

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