Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate
2005-09-20
2005-09-20
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Compound lens system
With curved reflective imaging element
C359S731000, C359S859000
Reexamination Certificate
active
06947210
ABSTRACT:
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system so as to sequentially reflect light from an object side to an image side, and being arranged so that light from the object surface to the first mirror may intersect light from the second mirror to the third mirror.
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Canon Kabushiki Kaisha
Fineman Lee
Morgan & Finnegan , LLP
Robinson Mark A.
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