Catoptric projection optical system and exposure apparatus...

Details Catoptric projection optical system and exposure apparatus... Catoptric projection optical system and exposure apparatus...

2006-12-26

2006-12-26

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S055000

Reexamination Certificate

active

07154586

ABSTRACT:
A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes six mirrors that include a first convex mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror in order of reflections of light, wherein the light incident upon the third mirror from the second mirror intersects with the light incident upon the fifth mirror from the fourth mirror.

REFERENCES:
patent: 6033079 (2000-03-01), Hudyma et al.
patent: 6172825 (2001-01-01), Takahashi
patent: 6922291 (2005-07-01), Sunaga et al.
patent: 2002-6221 (2000-01-01), None
patent: 2000-100694 (2000-04-01), None
patent: 2000-235144 (2000-08-01), None
patent: 02/056114 (2002-04-01), None

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