Catoptric projection optical system

Details Catoptric projection optical system Catoptric projection optical system

2007-06-05

2007-06-05

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

C359S350000

Reexamination Certificate

active

11264043

ABSTRACT:
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of −0.14 or smaller.

REFERENCES:
patent: 6033079 (2000-03-01), Hudyma
patent: 6262836 (2001-07-01), Hudyma et al.
patent: 6318869 (2001-11-01), Hudyma
patent: 6361176 (2002-03-01), Mashima
patent: 2002/0114089 (2002-08-01), Dinger et al.
patent: 2003/0147131 (2003-08-01), Terasawa
patent: 1 209 503 (2002-05-01), None
patent: WO 02/056114 (2002-07-01), None

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