Catoptric projection optical system

Details Catoptric projection optical system Catoptric projection optical system

2006-07-04

2006-07-04

Dunn, Drew A. (Department: 2872)

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

C359S857000, C359S858000

Reexamination Certificate

active

07070289

ABSTRACT:
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of −0.14 or smaller.

REFERENCES:
patent: 6033079 (2000-03-01), Hudyma
patent: 6262836 (2001-07-01), Hudyma et al.
patent: 6318869 (2001-11-01), Hudyma
patent: 6361176 (2002-03-01), Mashima
patent: 2002/0114089 (2002-08-01), Dinger et al.
patent: 2003/0147131 (2003-08-01), Terasawa
patent: 1 209 503 (2002-05-01), None
patent: WO 02/056114 (2002-07-01), None
Korean Office Action (Notice of Remarks Filing) mailed Aug. 31, 2005 with English language translation.

Affiliated with

Also associated with

Rating

Catoptric projection optical system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Catoptric projection optical system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Catoptric projection optical system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3596451