Catoptric objectives and systems using catoptric objectives

Optical: systems and elements – Compound lens system – With curved reflective imaging element

Reexamination Certificate

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Details

C359S363000, C359S364000, C359S366000

Reexamination Certificate

active

08004755

ABSTRACT:
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

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European Search Report.

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