Catoptric and catadioptric imaging systems with pellicle and...

Details Catoptric and catadioptric imaging systems with pellicle and... Catoptric and catadioptric imaging systems with pellicle and...

2007-02-20

2007-02-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C359S618000, C359S629000

Reexamination Certificate

active

11231544

ABSTRACT:
An interferometric system including: an interferometer that directs a measurement beam at an object point to produce a return measurement beam, focuses the return measurement beam to an image point in an image plane, and mixes the return measurement beam with a reference beam at the image point to form a mixed beam; a beam combining layer located at the image plane which is responsive to the mixed beam and produces an optical beam therefrom, wherein the layer comprises a thin film with an array of transmissive openings formed therein and further comprises a fluorescent material associated with each of the openings of the array of openings; a detector that is responsive to the optical beam from the beam combining layer; and an imaging system that directs the optical beam from the beam combining layer onto the detector.

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