Catoptric and catadioptric imaging systems with pellicle and...

Details Catoptric and catadioptric imaging systems with pellicle and... Catoptric and catadioptric imaging systems with pellicle and...

2006-08-22

2006-08-22

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07095508

ABSTRACT:
An interferometric system including: an interferometer that directs a measurement beam at an object point to produce a return measurement beam, focuses the return measurement beam to an image point in an image plane, and mixes the return measurement beam with a reference beam at the image point to form a mixed beam; a beam combining layer located at the image plane which is responsive to the mixed beam and produces an optical beam therefrom, wherein the layer comprises a thin film with an array of transmissive openings formed therein and further comprises a fluorescent material associated with each of the openings of the array of openings; a detector that is responsive to the optical beam from the beam combining layer; and an imaging system that directs the optical beam from the beam combining layer onto the detector.

REFERENCES:
patent: 3628027 (1971-12-01), Brauss
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4226501 (1980-10-01), Shafer
patent: 4272684 (1981-06-01), Seachman
patent: 4408884 (1983-10-01), Kleinknecht et al.
patent: 4672196 (1987-06-01), Canino
patent: 4685803 (1987-08-01), Sommargren
patent: 4733967 (1988-03-01), Sommargren
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5327223 (1994-07-01), Korth
patent: 5384639 (1995-01-01), Wickramasinghe
patent: 5392118 (1995-02-01), Wickramasinghe
patent: 5485317 (1996-01-01), Perissinotto
patent: 5602643 (1997-02-01), Barrett
patent: 5614763 (1997-03-01), Womack
patent: 5633972 (1997-05-01), Walt
patent: 5659420 (1997-08-01), Wakai
patent: 5699201 (1997-12-01), Lee
patent: 5757493 (1998-05-01), Vaknerkhove
patent: 5760901 (1998-06-01), Hill
patent: 5828455 (1998-10-01), Smith
patent: 5894195 (1999-04-01), McDermott
patent: 5915048 (1999-06-01), Hill et al.
patent: 5923423 (1999-07-01), Sawatari et al.
patent: 6011654 (2000-01-01), Schweizer Juergen et al.
patent: 6480285 (2000-03-01), Hill
patent: 6052231 (2000-04-01), Rosenbluth
patent: 6091496 (2000-07-01), Hill
patent: 6445453 (2000-08-01), Hill
patent: 6606159 (2000-08-01), Hill
patent: 6124931 (2000-09-01), Hill
patent: 6552805 (2001-07-01), Hill
patent: 6667809 (2001-07-01), Hill
patent: 6775009 (2001-07-01), Hill
patent: 6847029 (2001-07-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6330065 (2001-12-01), Hill
patent: 6552852 (2001-12-01), Hill
patent: 6018391 (2002-01-01), Yoshida
patent: 6714349 (2002-03-01), Nam
patent: 6447122 (2002-09-01), Kobayashi et al.
patent: 6469788 (2002-10-01), Boyd et al.
patent: 6753968 (2003-01-01), Hill
patent: 6847452 (2003-03-01), Hill
patent: 6597721 (2003-07-01), Hutchinson et al.
patent: 6707561 (2004-03-01), Budach et al.
patent: 6717736 (2004-04-01), Hill
patent: 6771374 (2004-08-01), Rangarajan et al.
patent: 6806959 (2004-10-01), Tukker
patent: 2002/0074493 (2002-06-01), Hill
patent: 2002/0131179 (2002-09-01), Hill
patent: 2003/0174992 (2003-09-01), Levene
patent: 2004/0201852 (2004-10-01), Hill
patent: 2004/0201853 (2004-10-01), Hill
patent: 2004/0201854 (2004-10-01), Hill
patent: 2004/0201855 (2004-10-01), Hill
patent: 2004/0202426 (2004-10-01), Hill
patent: 2004/0227950 (2004-11-01), Hill
patent: 2004/0227951 (2004-11-01), Hill
patent: 2004/0228008 (2004-11-01), Hill
patent: 2004/0246486 (2004-12-01), Hill
patent: 2004/0257577 (2004-12-01), Hill
patent: 2005/0036149 (2005-02-01), Hill
patent: 2005/0111006 (2005-05-01), Hill
patent: 2005/0111007 (2005-05-01), Hill
U.S. Appl. No. 60/442,858, filed Jan. 27, 2003, Hill.
U.S. Appl. No. 60/442,982, filed Jan. 29, 2003, Hill.
U.S. Appl. No. 60/443,980, filed Jan. 31, 2003, Hill.
U.S. Appl. No. 60/444,707, filed Feb. 4, 2003, Hill.
U.S. Appl. No. 60/445,739, filed Feb. 7, 2003, Hill.
U.S. Appl. No. 60/447,254, filed Feb. 13, 2003, Hill.
U.S. Appl. No. 60/448,360, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/448,250, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/459,493, filed Apr. 1, 2003, Hill.
U.S. Appl. No. 60/460,129, filed Apr. 3, 2003, Hill.
U.S. Appl. No. 60/459,425, filed Apr. 11, 2003, Hill.
U.S. Appl. No. 60/485,255, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/485,507, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/501,666, filed Sep. 10, 2003, Hill.
U.S. Appl. No. 60/506,715, filed Sep. 26, 2003, Hill.
U.S. Appl. No. 60/507,675, filed Oct. 1, 2003, Hill.
U.S. Appl. No. 60/568,774, filed May 6, 2004, Hill.
U.S. Appl. No. 60/569,807, filed May 11, 2004, Hill.
U.S. Appl. No. 60/571,967, filed May 18, 2004, Hill.
U.S. Appl. No. 60/573,196, filed May 21, 2004, Hill.

Affiliated with

Also associated with

Rating

Catoptric and catadioptric imaging systems with pellicle and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Catoptric and catadioptric imaging systems with pellicle and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Catoptric and catadioptric imaging systems with pellicle and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3715935