Chemistry: electrical and wave energy – Apparatus – Vacuum arc discharge coating
Patent
1997-08-30
1999-10-26
Nguyen, Nam
Chemistry: electrical and wave energy
Apparatus
Vacuum arc discharge coating
20419238, C23C 1432
Patent
active
059721855
ABSTRACT:
According to the present invention, an apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, apparatus for maintaining a vacuum in the vessel, an annular cathode having a bore and an evaporative surface extending between first and second end surfaces, apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode, and apparatus for steering the arc around the evaporative surface. The apparatus for steering the arc is positioned within the cathode bore, and produces a magnetic field that runs substantially parallel to the evaporative surface. The annular cathode is disposed radially inside of, and aligned with, the substrates inside the vessel.
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Beers Russell A.
Hendricks Robert E.
Marszal Dean N.
Noetzel Allan A.
Wright Robert J.
Getz Richard D.
McDonald Rodney G.
Nguyen Nam
United Technologies Corporation
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