Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1997-04-08
1999-04-20
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, C23C 1432
Patent
active
058955593
ABSTRACT:
A cathodic arc cathode is provided with an insulating ring in close proximity to the underside of the cantilevered edge of the target, and with no other conducting surface exposed in the coating system. An electrical connection is provided to opposite ends of the cathode through two or more low resistance resistors with high temperature coefficients of resistance. For all cases of cathodic arc deposition, the system causes the arc to reliably remain on the cathode surface and move randomly, thereby assuring uniform cathode erosion on large or small planar or cylindrical cathodes, which can be produced at low cost.
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McDonald Rodney G.
Nguyen Nam
Parker Sheldon H.
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