Cathodes for sputter-coating glass sheets or other substrates

Details Cathodes for sputter-coating glass sheets or other substrates Cathodes for sputter-coating glass sheets or other substrates

1974-08-28

1976-03-23

Kaplan, G. L.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C23C 1500

Patent

active

039459110

ABSTRACT:
A cathode for use in the sputter-coating of thin films of a selected coating material on glass sheets or other substrates. The cathode is of rectangular boxlike construction having a closed chamber therein containing a plurality of spaced partitions arranged to form a serpentine passageway through which a cooling medium is circulated. The side and end walls of the cathode defining the closed chamber extend above the top wall of said chamber and are provided with outwardly directed flanges which form a continuous rim for supporting the cathode in operative position in the coating apparatus.

REFERENCES:
patent: 3617463 (1971-11-01), Gregor et al.
patent: 3699034 (1972-10-01), Lins et al.
patent: 3718572 (1973-02-01), Robison et al.
patent: 3748253 (1973-07-01), Provenzano et al.
patent: 3793167 (1974-02-01), Glaser
patent: 3838031 (1974-09-01), Snaper
patent: 3890217 (1975-06-01), Burrows et al.

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