Coherent light generators – Particular pumping means – Electrical
Reexamination Certificate
2006-08-22
2006-08-22
Rodriguez, Armando (Department: 2828)
Coherent light generators
Particular pumping means
Electrical
C372S055000
Reexamination Certificate
active
07095774
ABSTRACT:
A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a discharge footprint and a lower portion. In one aspect of an embodiment of the present invention, the upper region may include copper and the lower region may include a copper alloy. A portion of the electrode facing a gas discharge region may be formed in an arcuate shape extending into straight line portions on either side of the arcuate portion. The straight line portions may terminate in vertical straight sides.
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Dyer Timothy S.
Morton Richard G.
Cray William C.
Cymer Inc.
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