Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Reexamination Certificate
2007-02-20
2007-02-20
Williams, Joseph (Department: 2879)
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
C445S046000
Reexamination Certificate
active
10963156
ABSTRACT:
A cathode with an improved work function, for use in a lithographic system, such as the SCALPEL™ system, which includes a buffer between a substrate and an emissive layer, where the buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth. The buffer layer may be a solid solution or a multiphase alloy. A method of making the cathode by depositing a buffer between a surface of the substrate and an emissive layer, where the deposited buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth.
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Jin Sung-ho
Katsap Victor
Waskiewicz Warren K.
Zhu Wei
Agere Systems Inc.
Williams Joseph
Won Bumsuk
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