Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Physical dimension specified
Patent
1995-03-06
1998-01-20
Turner, Archene
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Physical dimension specified
428432, 428428, 428697, 428698, 428699, 428701, 428702, 428913, 359580, 359581, C03C 1734
Patent
active
057099383
ABSTRACT:
Silicon-chromium cathode targets comprising 5 to 80 weight percent chromium are disclosed for sputtering absorbing coatings of silicon-chromium alloy in atmospheres comprising inert gas, reactive gases such as nitrogen, oxygen, and mixtures thereof which may further comprise inert gas, such as argon, to form nitrides, oxides, and oxynitrides as well as metallic films. The presence of chromium in the cathode target in the range of 5 to 80 weight percent provides target stability and enhanced sputtering rates over targets of silicon alone, comparable to the target stability and sputtering rates of silicon-nickel, not only when sputtering in oxygen to produce an oxide coating, but also when sputtering in inert gas, nitrogen or a mixture of nitrogen and oxygen to produce coatings of silicon-chromium, silicon-chromium nitride or silicon-chromium oxynitride respectively. The chromium in the target may be replaced in part with nickel, preferably in the range of 5 to 15 weight percent, to produce coatings of silicon-chromium-nickel and the oxides, nitrides and oxynitrides thereof.
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Harmuth Raymond J.
PPG Industries Inc.
Turner Archene
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