Measuring and testing – Vibration – By mechanical waves
Patent
1996-04-12
1999-09-21
Williams, Hezron
Measuring and testing
Vibration
By mechanical waves
73628, 73629, 73646, 20429803, 20429813, 20429814, G01N 2910
Patent
active
059556730
ABSTRACT:
A process using ultrasonic inspection for testing the internal soundness of cathode sputtering targets, whose active part is made of aluminum with a very high degree of purity or a very pure aluminum alloy, consisting, after selection of an ultrasound sensor functioning at an operating frequency greater than 5 MHz, preferably between 10 and 50 MHz, and adjusting the appropriate measurement sequence, using a target immersed in a liquid and which has ceratin artificial defects simulating decohesions in the target, taking a count in terms of size and number of the internal decohesions per unit volume and selecting, for the applications requiring a very high degree of etching fineness, the targets with a decohesion density of .ltoreq.0.1 decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target, and cathode sputtering targets selected according to the process having no more than 0.1 internal decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target.
REFERENCES:
patent: 4366713 (1983-01-01), Gilmore et al.
patent: 4741212 (1988-05-01), Rehwald
patent: 5406850 (1995-04-01), Bouchard et al.
Patent Abstracts of Japan, vol. 12, No. 443 (P-790), Nov. 22, 1988, JP-A-63-172960, Jul. 16, 1988.
"Using Acoustic Emission to Determine Dynamic Sputter Target Performance" by Anthony B. Cistola, Microelectyronic Manufacturing & Testing, Nov. 1985 pp. 32-33.
"Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness" by J.E. Greene and F. Sequeda-Osorio, J. Vac. Sci. Technol., vol. 10, No. 6, Nov./Dec. 1973 pp. 1144-1149.
"Attenuation of the Ultrasonic Waves in Metals. I Aluminum" by Hirone et al, Sci. Rpt. Tohoku Univ. First Series, 1955, pp. 455-464.
"Frequency and Grain Size Dependency of Ultrasonic Attenuation in Polycrystalline Materials" by Steven Serabian, British Jour. of NDT, Mar. 1980, pp. 69-77.
"Energy Losses of Sound Waves in Metals Due to Scattering and Diffusion" by WP Mason and HJ McSkimin, Journal of Applied Physics, vol. 19, Oct. 1948 pp. 940-946.
Leroy Michel
Muller Jean
Aluminium Pechiney
Miller Rose M.
Williams Hezron
LandOfFree
Cathode sputtering targets selected by ultrasonic inspection for does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Cathode sputtering targets selected by ultrasonic inspection for, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cathode sputtering targets selected by ultrasonic inspection for will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-82240