Cathode sputtering targets selected by ultrasonic inspection for

Measuring and testing – Vibration – By mechanical waves

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73628, 73629, 73646, 20429803, 20429813, 20429814, G01N 2910

Patent

active

059556730

ABSTRACT:
A process using ultrasonic inspection for testing the internal soundness of cathode sputtering targets, whose active part is made of aluminum with a very high degree of purity or a very pure aluminum alloy, consisting, after selection of an ultrasound sensor functioning at an operating frequency greater than 5 MHz, preferably between 10 and 50 MHz, and adjusting the appropriate measurement sequence, using a target immersed in a liquid and which has ceratin artificial defects simulating decohesions in the target, taking a count in terms of size and number of the internal decohesions per unit volume and selecting, for the applications requiring a very high degree of etching fineness, the targets with a decohesion density of .ltoreq.0.1 decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target, and cathode sputtering targets selected according to the process having no more than 0.1 internal decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target.

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Patent Abstracts of Japan, vol. 12, No. 443 (P-790), Nov. 22, 1988, JP-A-63-172960, Jul. 16, 1988.
"Using Acoustic Emission to Determine Dynamic Sputter Target Performance" by Anthony B. Cistola, Microelectyronic Manufacturing & Testing, Nov. 1985 pp. 32-33.
"Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness" by J.E. Greene and F. Sequeda-Osorio, J. Vac. Sci. Technol., vol. 10, No. 6, Nov./Dec. 1973 pp. 1144-1149.
"Attenuation of the Ultrasonic Waves in Metals. I Aluminum" by Hirone et al, Sci. Rpt. Tohoku Univ. First Series, 1955, pp. 455-464.
"Frequency and Grain Size Dependency of Ultrasonic Attenuation in Polycrystalline Materials" by Steven Serabian, British Jour. of NDT, Mar. 1980, pp. 69-77.
"Energy Losses of Sound Waves in Metals Due to Scattering and Diffusion" by WP Mason and HJ McSkimin, Journal of Applied Physics, vol. 19, Oct. 1948 pp. 940-946.

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