Cathode sputtering apparatus

Details Cathode sputtering apparatus Cathode sputtering apparatus

1980-09-18

1981-12-29

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

204192R, C23C 1500

Patent

active

043081266

ABSTRACT:
Cathode sputtering apparatus for coating articles which are rotated within a vacuum sputtering chamber and which are electrically biased includes a shaft for supporting the articles to be coated, wherein the shaft is supported by a plurality of non-lubricated bearings disposed within the vacuum chamber, at least one of the bearings being designed to conduct electricity to the shaft, that bearing being a thrust bearing supported by and in electrical contact with a bearing support plate and having races and rolling elements preferably made from either molybdenum or tungsten which are very hard materials with low electrical resistivity.

REFERENCES:
patent: 4090941 (1978-05-01), Wright et al.
patent: 4170541 (1979-10-01), Lamont, Jr.

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