Cathode shielded coating apparatus

Details Cathode shielded coating apparatus Cathode shielded coating apparatus

1980-01-28

1981-07-21

Kaplan, Morris

Coating apparatus

Gas or vapor deposition

With treating means

204298, C23C 1303

Patent

active

042792169

ABSTRACT:
A vacuum evaporator includes a housing defining a vacuum chamber which has mounting for an evaporative material and an electrode spaced from the evaporative material which is arranged adjacent the support for a substrate to be coated. A screening element is located between the electrode and the substrate support in the vacuum chamber. The vacuum chamber has a gas inlet port through which gases may be passed.

REFERENCES:
patent: 3437734 (1969-04-01), Roman et al.
patent: 3507248 (1970-04-01), Seeley et al.
patent: 3900585 (1975-08-01), Matsubara
patent: 4013533 (1977-03-01), Solal et al.
patent: 4038171 (1977-07-01), Moss et al.
patent: 4098919 (1978-07-01), Morimoto et al.

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