Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1987-06-02
1988-09-20
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310360, 310361, H01L 4108
Patent
active
047728175
ABSTRACT:
A piezoelectric crystal without spontaneous polarization such as Li.sub.2 B.sub.4 O.sub.7 or quartz crystal is jointed to a cathode on the side opposite to the tip thereof to finely drive the cathode. The surface observation apparatus mounting the cathode makes it possible to observe the surface of a sample at high speeds.
REFERENCES:
patent: 3805100 (1974-04-01), Klemp et al.
patent: 4342935 (1982-08-01), Kallmeyer et al.
patent: 4384230 (1983-05-01), Wisner
patent: 4438364 (1984-03-01), Morison
Aida Toshiyuki
Hosaka Sumio
Hosoki Shigeyuki
Ikeda Tadashi
Takeuchi Hiroshi
Budd Mark O.
Hitachi , Ltd.
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