Chemistry: electrical and wave energy – Apparatus – Electrolytic
Patent
1997-09-18
1999-12-21
Bell, Bruce F.
Chemistry: electrical and wave energy
Apparatus
Electrolytic
204DIG7, C25B 900
Patent
active
060044403
ABSTRACT:
A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.
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Berner Robert W.
Coyle Kevin W.
Doolittle James
Hanson Kyle M.
Haugan K. Chris
Bell Bruce F.
Semitool Inc.
Smith-Hicks Erica
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