Cathode arc discharge evaporating device

Details Cathode arc discharge evaporating device Cathode arc discharge evaporating device

1988-03-14

1989-07-18

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419238, 427 37, C23C 1428, C23C 1432

Patent

active

048490881

ABSTRACT:
Cathode arc discharge evaporating device having a body of revolution as cathode. The target surface is arranged at the outside surface of the body of revolution. To control movement of the arc spot a magnetic field generating device is provided inside the body of revolution, which may be moveable with respect to the cathode.

REFERENCES:
patent: 4221652 (1980-09-01), Kuriyama
patent: 4492845 (1985-01-01), Kljuchko et al.
patent: 4673477 (1987-06-01), Ramalingam et al.
Journal of Vacuum Science & Technology/A. vol. 4, No. 3, part 1, May-Jun. 1986, pp. 388-392, American Vacuum Society, Woodbury, N.Y., U.S.A.
M. Wright et al.: "Design Advances and Applications of the Rotatable Cylindrical Magnetron".
Instruments and Experimental Techniques, vol. 19, #4, part 2, Jul./Aug. 1976, pp. 1211-1213.

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