Catalytic composition for chemical-mechanical polishing,...

Details Catalytic composition for chemical-mechanical polishing,... Catalytic composition for chemical-mechanical polishing,...

2006-03-21

2006-03-21

Marcheschi, Michael A. (Department: 1755)

Abrasive tool making process, material, or composition

With inorganic material

C051S308000, C051S309000, C106S003000, C438S692000, C438S693000

Reexamination Certificate

active

07014669

ABSTRACT:
The present invention provides a composition for chemical-mechanical polishing which comprises at least one abrasive particle having a surface at least partially coated by a catalyst. The catalyst comprises a metal other than a metal of Group 4(b), Group 5(b) or Group 6(b). The composition further comprises at least one oxidizing agent. The composition is believed to be effective by virtue of the interaction between the catalyst coated on the surface of the abrasive particles and the oxidizing agent, at the catalyst surface. The invention further provides a method that employs the composition in the polishing of a feature or layer, such as a metal film, on a substrate surface. The invention additionally provides a substrate produced this method.

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