Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having moving solid-liquid-solid region
Reexamination Certificate
2005-01-18
2005-01-18
Hitesherw, Felisa (Department: 1765)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having moving solid-liquid-solid region
C117S084000, C117S092000
Reexamination Certificate
active
06843850
ABSTRACT:
A method for growing single-walled nanotubes comprises providing a silicon carbide semiconductor wafer comprising a silicon face and a carbon face, and annealing the silicon carbide semiconductor wafer in a vacuum at a temperature of at least about 1300 degrees Celsius, inducing formation of single wall carbon nanotubes on the silicon face.
REFERENCES:
patent: 6250984 (2001-06-01), Jin et al.
patent: 6630722 (2003-10-01), Aoki
M. Kusunoki et al.,A Formation Mechanism of Carbon Nanotube Films on SiC(0001), Applied Physics Letters, vol. 77, No. 4, Jul. 24, 2000, pp. 531-533.
Avouris Phaedon
Derycke Vincent
Martel Richard
Radosavljevic Marko
F. Chau & Associates LLC
Hitesherw Felisa
International Business Machines - Corporation
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