Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2006-04-18
2011-11-08
Cleveland, Michael (Department: 1716)
Coating apparatus
Gas or vapor deposition
C118S7230HC, C427S255280
Reexamination Certificate
active
08052795
ABSTRACT:
A catalyst-enhanced chemical vapor deposition (CECVD) apparatus and a deposition method, in which tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated. The CECVD apparatus may be constructed with a process chamber, a showerhead to introduce process gas into process chamber, a tensile catalyst wire structure provided in the process chamber to decompose the gas introduced from the showerhead, and a substrate on which the gas decomposed by the catalyst wire structure is deposited, so that the tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated, thereby eliminating occurrences of non-uniform temperatures of a substrate and non-uniform film growth, and concomitantly enhancing the durability of the catalyst wire.
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Furuno Kazuo
Kang Hee-Cheol
Kim Han-Ki
Kim Myoung-Soo
Bushnell , Esq. Robert E.
Cleveland Michael
Ford Nathan K
Samsung Mobile Display Co., Ltd.
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