Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1992-10-13
1995-04-04
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427123, 427124, 4272552, 4272557, 427554, C23C 1600
Patent
active
054036208
ABSTRACT:
A process for CVD including plasma enhanced and laser induced CVD using one or more precursor film forming metal compounds as the major film forming metal precursor, for example organotungsten, which is admixed with minor amounts of a precursor catalytic metal compound, for example, an organoplatinum compound, as a precursor to a catalytic metal in the presence of hydrogen gas to provide improved purity of deposited metal films having residual amounts of the catalytic metal incorporated therein.
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Kaplin, Yu A. et al. "Decomposition of Nickelocene in Presence of Hydrogen" Jan. 1980, pp. 118-121, UDC. 547.1' 174, c. 1980, Plenum Publishing Corp., translated from Zharnal Obshchei Khimir, 50, 118 (1980).
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Miller, Timothy M. et al, "Heterogeneous, Platinum-Catalyzed Hydrogenation of (Diolofin)dialkylplatinum (II)Complexes: Kinetics", 1988, pp. 3146-3156, J. Amer Chem Soc vol 110 #10 no month.
Hicks Robert F.
Kaesz Herbert D.
Beck Shrive
Bethel George F.
Bethel Patience K.
Dang Vi Duong
Regents of the University of California
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