Catadioptric reduction projection optical system and exposure ap

Details Catadioptric reduction projection optical system and exposure ap Catadioptric reduction projection optical system and exposure ap

1995-08-16

1999-01-19

Epps, Georgia Y.

Optical: systems and elements

Lens

With reflecting element

359720, G02R 2700

Patent

active

058619976

ABSTRACT:
A catadioptric projection optical system is provided, which can use a beam splitting optical system smaller in size than a conventional polarizing beam splitter, can set a long optical path from a concave reflecting mirror to an image plane, allows easy adjustment of the optical system, and has excellent imaging performance. A light beam from an object surface forms a first intermediate image through a refracting lens group. A light beam from the first intermediate image passes through a polarizing beam splitter and is reflected by a concave reflecting mirror to form a second intermediate image in the polarizing beam splitter. A light beam from the second intermediate image is reflected by the polarizing beam splitter means to form a final image on the image plane via a refracting lens group. The polarizing beam splitter means is arranged near the positions at which the intermediate images are formed.

REFERENCES:
patent: 4953960 (1990-09-01), Williamson
patent: 5089913 (1992-02-01), Singh
patent: 5220454 (1993-06-01), Ichihara et al.
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5402267 (1995-03-01), Furter et al.

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