Catadioptric reduction projection optical system

Details Catadioptric reduction projection optical system Catadioptric reduction projection optical system

1996-06-26

1998-12-01

Phan, James

Optical: systems and elements

Lens

With reflecting element

359732, G02B 1700

Patent

active

058447288

ABSTRACT:
A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.

REFERENCES:
patent: 5089913 (1992-02-01), Singh et al.
patent: 5212593 (1993-05-01), Williamson et al.
patent: 5668673 (1997-09-01), Suenaga et al.

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