Catadioptric reduction projection optical system

Details Catadioptric reduction projection optical system Catadioptric reduction projection optical system

1992-09-22

1993-10-05

Lerner, Martin

Optical: systems and elements

Lens

With reflecting element

359727, G02B 1700

Patent

active

052510700

ABSTRACT:
This invention intends to provide a catadioptric reduction projection optical system of a construction in which an on-axis light beam is used in a catadioptric system and resolving power is prevented from being deteriorated, and more particularly a catadioptric reduction projection optical system having a first lens unit G1 of negative refractive power for diffusing a light beam from a reticle 1, a semi-transparent mirror 5 for transmitting therethrough the light beam from the first lens unit G1, plane parallel plates 2, 3 and 4 disposed obliquely with respect to the optical axis between the first lens unit G1 and the semi-transparent mirror 5 for correcting aberrations attributable to the semi-transparent mirror 5, a concave reflecting mirror 7 for returning the light beam emerging from the semi-transparent mirror 5 to the semi-transparent mirror 5 while converging the light beam, and a second lens unit G3 of positive refractive power for converging the light beam returned to the semi-transparent mirror 5 and reflected by the semi-transparent mirror 5 and forming the reduced image of the pattern on the reticle 1 on a wafer 8.

REFERENCES:
patent: 3698808 (1972-10-01), Delmas
patent: 4747678 (1988-05-01), Shafer et al.
patent: 4953960 (1990-09-01), Williamson
patent: 5089913 (1992-02-01), Singh et al.

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