Catadioptric reduction projection optical system

Details Catadioptric reduction projection optical system Catadioptric reduction projection optical system

1996-06-26

1998-01-27

Nelms, David C.

Optical: systems and elements

Lens

With reflecting element

359732, 359736, G02B 1700

Patent

active

057127352

ABSTRACT:
A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.

REFERENCES:
patent: 5241423 (1993-08-01), Chiu et al.

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