Catadioptric reduction projection optical system

Details Catadioptric reduction projection optical system Catadioptric reduction projection optical system

1995-06-01

1997-09-16

Nguyen, Thong

Optical: systems and elements

Lens

With reflecting element

359364, 359366, 359727, G02B 1700, G02B 2100

Patent

active

056686730

ABSTRACT:
A first partial optical system including a first group of lenses having a positive refractive power, a first concave reflection mirror and a second group of lenses having a positive refractive power, for forming a primary reduced image of an object, a second partial optical system including a second concave reelection mirror and a third group of lenses having a positive refractive power, for further reducing the primary reduced image and refocusing it, and a reflection mirror arranged between the first partial optical system and the second partial optical system, for deflecting a light path are arranged in a sequence as viewed from the object. A good image-forming ability as a projection optical system for fabricating a semiconductor device is attained with a simple construction.

REFERENCES:
patent: 4241390 (1980-12-01), Markle et al.
patent: 4812028 (1989-03-01), Matsumoto
patent: 5212593 (1993-05-01), Williamson et al.
patent: 5220454 (1993-06-01), Ichihara et al.
patent: 5251070 (1993-10-01), Hashimoto et al.
patent: 5323263 (1994-06-01), Schoenmakers

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