Catadioptric reduction projection optical system

Details Catadioptric reduction projection optical system Catadioptric reduction projection optical system

1992-09-22

1994-02-22

Arnold, Bruce Y.

Optical: systems and elements

Polarization without modulation

Polarizarion by dichroism

359495, 359727, 359732, 359738, G02B 1708, G02B 2728

Patent

active

052893120

ABSTRACT:
A catadioptric reduction projection optical system is of a construction in which an on-axis light beam is used in a catadioptric system, and is designed such that resolving power is not deteriorated and a stop can be disposed. The catadioptric reduction projection optical system has a first lens unit G1 having negative refractive power and diffusing a light beam from a reticle 1, a semi-transparent mirror 2 for transmitting therethrough or reflecting the light beam from the first lens unit G1, a second lens unit G2 having negative refractive power and widening the light beam reflected from the semi-transparent mirror 2, a concave reflecting mirror 4 for returning the light beam from the second lens unit G2 to the semi-transparent mirror 2 through the second lens unit G2 while converging that light beam, a third lens unit G3 having positive refractive power and converging the light beam returned to and transmitted through the semi-transmitted mirror 2 on a wafer 5, and a stop 6 disposed between the semi-transparent mirror 2 and the third lens unit G3.

REFERENCES:
patent: 3698808 (1972-10-01), Delmas
patent: 4676607 (1987-06-01), Wakamiya
patent: 4747678 (1988-05-01), Shafer et al.
patent: 4793696 (1988-12-01), Suh
patent: 4953960 (1990-09-01), Williamson

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