Optical: systems and elements – Lens – With reflecting element
Patent
1998-09-14
2000-05-30
Epps, Georgia
Optical: systems and elements
Lens
With reflecting element
359730, 359732, G02B 1700
Patent
active
060697490
ABSTRACT:
A catadioptric reduction optical system capable of imaging an object by scanning in a scanning direction. The system comprises, objectwise to imagewise, a first optical system, a beam splitter, and a second optical system arranged adjacent the beam splitter opposite the image side thereof. The second optical system includes at least one concave mirror. The system also includes a third optical system arranged adjacent said beam splitter imagewise thereof, an aperture stop, and a fourth optical system having positive refractive power. The third and fourth optical systems include a plurality of lens elements preferably comprising of at least two glass types for facilitating the correction of aberrations. The system is designed such that the beam splitter is of a practical size, while allowing for a suitable working distance on the image side, a large numerical aperture, and sub-quarter micron resolution in the ultraviolet wavelength range.
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Epps Georgia
Nikon Corporation
Schwartz Jordan M.
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