Catadioptric reduction optical system

Optical: systems and elements – Lens – With reflecting element

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Details

359730, 359732, G02B 1700

Patent

active

060697490

ABSTRACT:
A catadioptric reduction optical system capable of imaging an object by scanning in a scanning direction. The system comprises, objectwise to imagewise, a first optical system, a beam splitter, and a second optical system arranged adjacent the beam splitter opposite the image side thereof. The second optical system includes at least one concave mirror. The system also includes a third optical system arranged adjacent said beam splitter imagewise thereof, an aperture stop, and a fourth optical system having positive refractive power. The third and fourth optical systems include a plurality of lens elements preferably comprising of at least two glass types for facilitating the correction of aberrations. The system is designed such that the beam splitter is of a practical size, while allowing for a suitable working distance on the image side, a large numerical aperture, and sub-quarter micron resolution in the ultraviolet wavelength range.

REFERENCES:
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patent: 5220454 (1993-06-01), Ichihara et al.
patent: 5289312 (1994-02-01), Hashimoto et al.
patent: 5694241 (1997-12-01), Ishiyama et al.
patent: 5715084 (1998-02-01), Takahashi et al.
patent: 5742436 (1998-04-01), Furter
patent: 5861997 (1999-01-01), Takahashi

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