Catadioptric reduction objective

Details Catadioptric reduction objective Catadioptric reduction objective

1993-11-18

1995-03-28

Ben, Loha

Optical: systems and elements

Lens

With reflecting element

359732, G02B 1700

Patent

active

054022673

ABSTRACT:
The invention is directed to a catadioptric reduction objective having a concave mirror, a beam splitter and several lens groups but without an additional lens group disposed between the concave mirror and the beam splitter. Catadioptric reduction objectives are disclosed having an image-side aperture of 0.52 and 0.58 for an imaging scale of 1:4 and are corrected for an unrestricted excimer laser for use in submicronlithography.

REFERENCES:
patent: 3698808 (1972-10-01), Delmas
patent: 4953960 (1990-09-01), Williamson
patent: 5089913 (1992-02-01), Singh et al.

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