Catadioptric projection optical system, exposure apparatus...

Details Catadioptric projection optical system, exposure apparatus... Catadioptric projection optical system, exposure apparatus...

2008-01-08

2008-01-08

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Compound lens system

With curved reflective imaging element

C359S727000, C359S732000, C355S067000

Reexamination Certificate

active

11196378

ABSTRACT:
A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group including a concave mirror and a third lens group that an incidence light and reflected light from the concave mirror pass, and a second dioptric group. A first deflective reflector is arranged between the first lens group and the second lens group. A second deflective reflector is arranged between the second lens group and the third lens group or between the third lens group and the second dioptric group. A first intermediate image is formed between the second lens group and the concave mirror. A second intermediate image is formed between the concave mirror and the second dioptric group.

REFERENCES:
patent: 5742436 (1998-04-01), Furter
patent: 5861997 (1999-01-01), Takahashi
patent: 7030958 (2006-04-01), Luijkx et al.
patent: 2002/0044260 (2002-04-01), Takahashi et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 8-62502 (1996-03-01), None
patent: 2002-83766 (2002-03-01), None
patent: 2002-182112 (2002-06-01), None

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