Catadioptric projection optical system, exposure apparatus...

Details Catadioptric projection optical system, exposure apparatus... Catadioptric projection optical system, exposure apparatus...

2007-10-16

2007-10-16

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Compound lens system

With image recorder

C359S726000

Reexamination Certificate

active

11257785

ABSTRACT:
A catadioptric optical system comprising a first imaging optical system including a concave mirror and forming an intermediate image of a first object, said first imaging optical system forming a reciprocating optical system that an incidence light and reflected light pass, a second imaging optical system for forming an image of the intermediate image onto a second object, and a first optical path deflective member, provided between the concave mirror and the intermediate image, for introducing a light from the first imaging optical system to the second imaging optical system, wherein said first optical path deflective member deflects a light in such a direction that a forward path of the first imaging optical system intersects a return path of the first imaging optical system, and wherein said intermediate image is formed without an optical element after a deflection.

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