Catadioptric projection optical system and exposure...

Details Catadioptric projection optical system and exposure... Catadioptric projection optical system and exposure...

2007-08-07

2007-08-07

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S726000, C359S364000, C355S057000

Reexamination Certificate

active

11255371

ABSTRACT:
A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.

REFERENCES:
patent: 5861997 (1999-01-01), Takahashi
patent: 2004/0130806 (2004-07-01), Takahashi
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2005/0117224 (2005-06-01), Shafer et al.
patent: 2006/0028715 (2006-02-01), Kato et al.
patent: 8-62502 (1996-03-01), None
patent: 2003-307679 (2003-10-01), None
patent: 2004-205698 (2004-07-01), None
patent: 2004-227364 (2004-08-01), None
patent: 2004-305248 (2004-11-01), None

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