Catadioptric projection apparatus

Optical: systems and elements – Lens – With reflecting element

Patent

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Details

359639, 359640, G02B 1700

Patent

active

056382189

ABSTRACT:
Illumination light having passed a pattern formed on a first surface enters a beam splitter directly or through a refracting system. On this occasion, inside the beam splitter, at least part of the illumination light having passed through an entrance surface is transmitted or reflected by a direction changing surface and then passes through an exit/entrance surface. Subsequently, the illumination light first leaving the beam splitter is reflected by a reflective surface of a concave mirror and then again enters the beam splitter. On this occasion, inside the beam splitter, at least part of the illumination light having passed through the exit/entrance surface is reflected or transmitted by the direction changing surface then to pass through an exit surface. The illumination light thus again leaving the beam splitter is projected directly or through a refracting system onto a second surface to form an image of the pattern thereon. Here, an orthogonal projection area of the direction changing surface on the exit/entrance surface is made different from an area of the exit/entrance surface, whereby the beam splitter is constructed in a decreased size.

REFERENCES:
patent: 4953960 (1990-09-01), Williamson
patent: 5089913 (1992-02-01), Singh et al.
patent: 5241423 (1993-08-01), Chiu et al.

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