Catadioptric optical system for scatterometry

Details Catadioptric optical system for scatterometry Catadioptric optical system for scatterometry

2007-07-18

2009-12-15

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S364000, C355S055000

Reexamination Certificate

active

07633689

ABSTRACT:
A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric optical system includes a correcting plate, a first reflective surface and a second reflective surface. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The first reflective surface is positioned to reflect the electromagnetic radiation conditioned by the correcting plate. The second reflective surface is positioned to focus the electromagnetic radiation reflected by the first reflective surface onto a target portion of a substrate. The electromagnetic radiation reflected by the first reflective surface and focused by the second reflective surface is not refracted by a refractive element, thereby enabling the catadioptric optical system to operate in a broad spectral range.

REFERENCES:
patent: 2380887 (1945-07-01), Wamnisham
patent: 2683394 (1954-07-01), Polanyi et al.
patent: 5136413 (1992-08-01), MacDonald et al.
patent: 5347364 (1994-09-01), Kawasaki et al.
patent: 5912741 (1999-06-01), Carter et al.
patent: 6560039 (2003-05-01), Webb et al.
patent: 6956694 (2005-10-01), Shafer et al.
patent: 2006/0033921 (2006-02-01), Den Boef et al.
patent: 2006/0109436 (2006-05-01), Van Der Laan et al.
patent: 2006/0219930 (2006-10-01), Lange
patent: 2006/0238856 (2006-10-01), Shafer et al.
patent: 2006/0279837 (2006-12-01), Chuang et al.
patent: 0 243 950 (1987-11-01), None
patent: WO 02/50509 (2002-06-01), None
patent: WO 2006/059330 (2006-06-01), None
Extended Search Report for European Application No. 08252443.0-2217/2017662 mailed Mar. 25, 2009, 9 pgs.

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