Catadioptric optical system and exposure apparatus having the sa

Details Catadioptric optical system and exposure apparatus having the sa Catadioptric optical system and exposure apparatus having the sa

1995-11-03

1997-11-25

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 77, 355 60, 355 43, 359727, 359730, 359366, G03B 2742

Patent

active

056918020

ABSTRACT:
It is an object of the invention to provide a catadioptric optical system with an arrangement for realizing a large numerical aperture and reducing the diameter of a concave mirror while ensuring a sufficient working distance on the image side, and also an exposure apparatus using this catadioptric optical system.
A catadioptric optical system according to the invention includes a first imaging optical system for forming an intermediate image of a pattern on a first plane, a second imaging optical system for forming a reduced image of the intermediate image on a second plane, and an optical path deflecting member for guiding a light beam from the first imaging optical system to the second imaging optical system. The first imaging optical system has at least a first optical element group having a positive refracting power, and a second optical element group having a concave mirror and a meniscus lens component with a concave surface facing the first imaging optical system. In particular, the first optical element group having a positive refracting power is arranged to guide a light beam from the first plane to the second optical element group.

REFERENCES:
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patent: 5052763 (1991-10-01), Singh et al.
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patent: 5303001 (1994-04-01), Jeong et al.
patent: 5402205 (1995-03-01), Markle et al.
patent: 5467166 (1995-11-01), Shiraishi

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